Product - SEMI E84
The proven SEMI E84
integration platform.
SmartBoxE84 handles the full E84 protocol and drives optical IR transceivers - so your team focuses on your product, not on the standard. The reference solution for OEMs integrating E84 in new tools, and FABs upgrading legacy fleets.
The Standard
What is SEMI E84?
SEMI E84 defines the communication protocol and handshaking sequences for material handoff between AMHS vehicles (OHTs, AMRs) and production equipment in semiconductor fabs.
Without E84, your equipment cannot communicate with the automated material handling system - meaning no wafer pod transfer automation, no AMHS compatibility, no fab integration.
SmartBoxE84 embeds all E84 sequences and handles the complete handshake autonomously. Your software only needs to expose loadport status.
