Connect any
equipment
to any factory
system.

SmartGem is a modular, flexible SECS/GEM software platform that upgrades any equipment or device to full factory Host communication – supporting GEM200/300, E84, E87, E90, E142 and all major SEMI standards.

Smart Gem HOST / MES DC / FDC Sensors TOOLS Robots UI / HMI Legacy HW SEMI E84 AMHS
The Platform

One platform. Every SEMI protocol. Every equipment type.

SmartGem is a proven interoperability software framework that enables semiconductor equipment to communicate with factory systems – MES, Host, data collectors, FDC systems, UI/HMI interfaces, sensors, robots and more.

It handles the SEMI protocol layer so your team focuses on your equipment’s application logic, not on standard implementation. Template-based, scripting-friendly and fast to deploy.

E4 · E5 · E37E30 GEM200/300E39 · E40E84 AMHSE87 CMSE88E90 STSE94E142REST · TCP · RS232MQTT
Platform Features

Built for semiconductor engineers,
not for SEMI standards experts.

Template-Oriented Integration

Pre-built tool integration templates dramatically reduce time-to-first-SECS message. Proven patterns for the most common equipment types – just configure, not re-engineer.

Scripting Flexibility

Full scripting support for advanced customization. Implement custom sequences, conditional logic, alarms, events and data collection without leaving the SmartGem framework.

Embedded WebAdmin

Browser-based administration interface for configuration, monitoring, diagnostics and live data inspection – accessible from anywhere on the fab network.

Multi-Protocol Connectivity

Native support for SECS/HSMS, SECS/RS232, REST, TCP, Modbus, RS232 and MQTT. Connect to any system in your fab ecosystem – MES, FDC, ERP, robots and sensors.

FAB Cell Controller

SmartGem can act as an automation cell controller – bridging equipment, MES and FDC systems in complex fab architectures. Template-based for fast tool onboarding.

Proven at Fab Scale

Deployed with OEMs and in production fabs worldwide. Stress-tested for reliability, concurrent connections and long-running operations in 24/7 production environments.

Use Cases

SmartGem connects what needs
to be connected.

Equipment to Host / MES

Upgrade legacy or new equipment to full SECS/GEM communication with the factory Host or MES – GEM200/300 compliant, all major SEMI standards.

OEMFAB

E84 / AMHS Integration

Deploy SmartGem alongside SmartBoxE84 for a complete SECS/GEM + E84 stack. The reference solution for OEMs needing both Host communication and AMHS compatibility.

OEMAMHS

Data Collection

Extract process data, alarms and events from SECS/GEM equipment and route them to SPC, FDC, ERP or data lake systems via REST or MQTT.

FABFDC

Robot & Peripheral Integration

Integrate robots, sensors, towerlight, cameras and other peripherals into the equipment’s GEM model – extending the SEMI standard to the full tool ecosystem.

OEMAutomation

UI / HMI Development

Build custom operator interfaces connected to the SECS/GEM equipment model. Real-time data, alarm views and operator commands without custom middleware.

OEMHMI

Legacy Equipment Upgrade

Bring legacy equipment with SECS/RS232 or older interfaces up to modern HSMS standards – extending asset life and deferring costly replacements.

FABLegacy
Exclusive Technology

SmartPassThrough –
Non-intrusive data extraction.

SmartPassThrough (SPT) is our exclusive technology that creates a new data channel from any SECS/GEM equipment – without touching the equipment software, the Host communication, or the automation layer.

SPT taps the SECS/HSMS line and extracts the data your systems need – alarms, events, process data, loadport status – routing it to any destination.

No impact on Automation / MES

The SECS/HSMS communication between Host and equipment is completely transparent. Nothing is interrupted.

No modification to equipment software

The tool runs exactly as before. SPT is a passive tap on the line – your equipment doesn’t know it’s there.

Trigger alarms and events to Automation

Extract signals from SECS messages to feed E84 sequences, FDC systems or custom automation – no extra tool integration required.

Note: SmartPassThrough is an option, not included in the standard SmartBoxE84 package. Engineering work is required per tool type to identify the relevant SECS messages. Contact us to assess your specific use case.

SECS/GEM · HSMS Automation / MES HOST Equipment TOOL SmartPass Through SPT DATA Collection SPC / FDC / Analysis Peripherals Sensors / Robots / ...
SmartPassThrough is currently running in 3,000+ units deployed across semiconductor fabs worldwide.
Get Started

Need SECS/GEM for your equipment or fab?

Our engineers will assess your requirements and propose the right SmartGem configuration. Whether it’s a single tool integration or a fab-wide data collection architecture.