Product – SEMI E84

The proven SEMI E84
integration platform.

SmartBoxE84 handles the full E84 protocol and drives optical IR transceivers – so your team focuses on your product, not on the standard. The reference solution for OEMs integrating E84 in new tools, and FABs upgrading legacy fleets.

2,500+Deployed WW
25+OEMs Integrating
3+FABs Upgraded
SmartBoxE84
Versions1, 2 or 4 ports
Power24V DC · DIN Rail
ModesActive / passive
InterfacesTCP · REST · IOs
The Standard

What is SEMI E84?

SEMI E84 defines the communication protocol and handshaking sequences for material handoff between AMHS vehicles (OHTs, AMRs) and production equipment in semiconductor fabs.

Without E84, your equipment cannot communicate with the automated material handling system – meaning no wafer pod transfer automation, no AMHS compatibility, no fab integration.

SmartBoxE84 embeds all E84 sequences and handles the complete handshake autonomously. Your software only needs to expose loadport status.

SEMI E84 interface
The 3 Fundamental Promises

Why engineers choose SmartBoxE84

IO

Non-Intrusive

No modification to your equipment software. No disruption to automation or MES. No production downtime required. SmartBoxE84 works alongside your existing infrastructure – this is our #1 differentiator.

FAST

Simple & Fast

No SEMI E84 expertise needed. SmartBoxE84 embeds all standard sequences and scenarios. Complete documentation, code examples and embedded simulators let you test immediately. Configure via intuitive web interface.

FLEX

Flexible & Universal

4 integration modes to fit any architecture. Compatible with Hokuyo, Cantops and GetControl transceivers. Active AND passive mode. Open, modular architecture ready for any custom scenario.

Key Features

Everything you need,
nothing you don’t

SmartBoxE84 is field-tested across thousands of tools and dozens of OEMs worldwide. Here’s what makes it the industry standard for E84 integration.

TCP

Flexible Integration Modes

For OEMs: native TCP API integration into your tool controller. For FABs: Digital IOs, SECS/GEM PassThrough or FAB Port Server – zero impact on your existing automation.

1D

Hours, Not Months

Full documentation, API references and embedded simulators for OEMs. Non-intrusive modes for FABs – no E84 expertise needed by your team. First port running in a day.

4X

4 Integration Modes

Native TCP API, Digital IOs, SECS/GEM PassThrough or FAB Port Server. Choose the method that fits your architecture exactly.

IR

Universal Transceiver Support

Drives most IR optical transceivers on the market: Hokuyo, Cantops, GetControl and others. Active and passive modes supported.

4P

Up to 4 Independent Ports

One SmartBoxE84 can handle up to 4 independent loadports simultaneously. 24V DC, DIN rail form factor – minimal footprint in your cabinet.

WEB

WebAdmin & Remote Tools

Browser-based configuration, real-time LED signal visualization, timestamped logs and an embedded vehicle simulator to test without hardware.

Integration Modes

Four ways to integrate.
One solution for every use case.

SmartBoxE84 adapts to your context – whether you are an OEM integrating E84 in a new tool, or a FAB upgrading a legacy fleet.

Integration Mode OEM New Tool FAB Legacy Upgrade FAB Full Deployment
SmartBoxE84 Native TCP API ●●●
SmartBoxE84 Native Digital IOs ●● ●●
SECS/GEM PassThrough (option) ●● ●●●
FAB Port Server API (option) ●●●
Embedded Tools

Test, debug and monitor
without leaving your browser

WebAdmin interface

WebAdmin Interface

Remote configuration, port management, real-time monitoring and log access – all through a standard browser, from anywhere on the network.

LED signal visualization

LED Signal Visualization

Real-time visualization of all E84 signal states. Timestamped logs to diagnose handshake issues instantly – no oscilloscope needed.

Vehicle simulator

Vehicle Simulator

Simulate OHT/AMR vehicle behavior to validate your E84 implementation before connecting real hardware. Ship faster with confidence.

Configurations

Choose your SmartBoxE84

Available in 1, 2 or 4 independent E84 port configurations. One box covers your entire loadport setup.

SmartBoxE84

1

E84 Port

New – Compact single-port configuration

SmartBoxE84

4

E84 Ports

Maximum coverage – one box for 4 loadports

All configurations include WebAdmin, LED visualizer, vehicle simulator and full documentation. Download the datasheet ->
Technical Documentation

Full specs, pinouts and integration examples

Download the SmartBoxE84 datasheet to get all technical specifications, connector pinouts, integration diagrams and example code for all 4 integration modes.